Auriga TM Crossbeam Basissystem
+ EDAX TEAM Pegasus


TEM Sample Preparation (FIB-lamellas). Atomprobe Sample Preparation. EDS/EBSD Analysis (2D and 3D).

Specific information on the methode:

Resolution SEM:               1,9nm/1kV; 1,0nm/15kV
Resolution FIB:                  2,5nm/30kV (lateral)
EDS elements:                   including Be (Z=4)

Specific information on the equipment/instrumentation:

Computerized Field Emmission (FE) – Scanning Electron Microscope (SEM) with Patented GEMINI electromagnetic/electrostatic objective lens system. Detectors: Chamber Detectors (Everhart-Thornley SE detector/ Combined Secondary Electron Secondary Ion – SESI – detector), EsB (detection of energy and angle selective backscattered electrons), In-lens Detector (mounted in GEMINI column), 4QBSE-detector (pneumatic retractable 4 Quadrantsolid state BSE-detector), STEM detector (Scanning Transmission Electron Microscope detector).
Cobra Focused Ion Beam (FIB) Column with gallium source (service life: 1500µAh).
Single GIS (Gas Injection System): Pt (Platinum).
Omniprobe Nanomanipulator.
Zeiss NanoPattering Engine ATLAS.
EDS-EBSD-System EDAX PEGASUS TEAM with Hikari-EBSD-Camera and Octane Super EDS-Detector (60mm²), 2D and 3D.


Target-preparation or preparation at materials, where electropolishing does not work: for example Lithium batteries, Fe-Cr alloys, W alloys, Hydrogen containing materials.

Examples of typicaly analytical questions:

Studying material structure and corrosion processes on Lithium batteries. Investigating micro- and nanostructure and grain orientations of alloys. Characterization of precipitate or particle distribution in those materials.

Fields of research:

Primarily, materials for programs to Renewable energy and its energy storage facilities (e.g. Lithium batteries).